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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,186 edits
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Once the Nanolab Loading Team has loaded the cassette to the auto stocker the cassette can  
Once the Nanolab Loading Team has loaded the cassette to the auto stocker the cassette can  
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Only Nanolab staff may load cassettes to the auto stocker. Users must ask the EBL Loading Team for help with this. Photo: Thomas Pedersen.
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Prior to exposure the chosen cassette has to be transferred from the auto stocker system and to the main chamber. This is done from the “Loader” module on the control computer
Prior to exposure the chosen cassette has to be transferred from the auto stocker system and to the main chamber. This is done from the “Loader” module on the control computer
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