Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The '''Loader''' window shows available cassettes in the automatic transfer system and which cassette is currently inside the writing system. In this example cassette 10 is inside the writing system. Cassettes can be moved between the writing system and the transfer system with the '''Carry in''' and '''Carry out''' buttons. '''Carry in''' will move the selected cassette to the writing system while '''Carry out''' will move the selected cassette to the selected shelf in the transfer system. | The '''Loader''' window shows available cassettes in the automatic transfer system and which cassette is currently inside the writing system. In this example cassette 10 is inside the writing system. Cassettes can be moved between the writing system and the transfer system with the '''Carry in''' and '''Carry out''' buttons. '''Carry in''' will move the selected cassette to the writing system while '''Carry out''' will move the selected cassette to the selected shelf in the transfer system. In order to move a particular cassette into the writing system the current cassette must naturally be moved out first. | ||
The '''EXCH EVAC''' switch must always be left unchecked as in this example. If it is toggled on the exchange chamber (load lock) will be pumped down after a carry out operation and the next carry in operation must then wait an additional 15 min before it can be executed. Always leave '''EXCH EVAC''' off. | |||
Once the Nanolab Loading Team has loaded the cassette to the auto stocker the cassette can | Once the Nanolab Loading Team has loaded the cassette to the auto stocker the cassette can | ||