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=Sample mounting=
=Sample mounting=
The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. Slots are all 50 mm in width, the heights are 20, 12, 8 or 4 mm. A chip must have one side length at least 1 mm larger than the height such that it can safely be clamped in the slot. Thus the smallest possible chip to expose must have one side length of at least 5 mm.
The JEOL 9500 system uses a proprietary sample cassette format and thus each sample must be mounted in an appropriate cassette. Cassettes are available for wafer sizes from 2” to 8”. Smaller chips must be mounted in dedicated chip cassettes with slots of four different sizes available. For more information on available cassettes and their specifications please refer to the cassette specifications page found here - UPDATE.


The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes.
For the tutorial job we are using a 4" wafer and hence it must be mounted in one of the 4” cassettes, in this case the 4" aluminium cassette (BM2P-011).  


A complete list of cassettes with specifications can be found here - UPDATE.
For our exposure we will use a 4” cassette.


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Samples can be loaded into appropriate cassettes on the cassette preparation table. Photo: Thomas Pedersen.
Samples can be loaded into appropriate cassettes on the cassette preparation table. Photo: Thomas Pedersen.
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The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes. A complete list of cassettes with specifications can be found here - UPDATE.


Users are allowed to unload a cassette from the auto stocker system and mount their sample(s). Users are however not allowed to put cassettes back into the auto stocker system and thus users must always contact the Nanolab E-beam loading team prior to exposure to have their cassette loaded into the auto loading system. The E-beam loading team can be contacted at [email]. Upon loading a cassette Nanolab staff will visually verify the sample has been inserted and secured correctly. Incorrect sample mounting can lead to severe damage to the internal parts of the JEOL 9500 exposure system.
Users are allowed to unload a cassette from the auto stocker system and mount their sample(s). Users are however not allowed to put cassettes back into the auto stocker system and thus users must always contact the Nanolab E-beam loading team prior to exposure to have their cassette loaded into the auto loading system. The E-beam loading team can be contacted at [email]. Upon loading a cassette Nanolab staff will visually verify the sample has been inserted and secured correctly. Incorrect sample mounting can lead to severe damage to the internal parts of the JEOL 9500 exposure system.
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