Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes. | The system is fitted with an auto stocker system that can store 10 cassettes. It is thus possible to prepare multiple substrates and define an automated job to execute exposure of several substrates across several cassettes. | ||
A complete list of cassettes with specifications can be found here - UPDATE. | |||
For our exposure we will use a 4” cassette. | |||
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Samples can be loaded into appropriate cassettes on the cassette preparation table. Photo: Thomas Pedersen. | Samples can be loaded into appropriate cassettes on the cassette preparation table. Photo: Thomas Pedersen. | ||
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Users are allowed to unload a cassette from the auto stocker system and mount their sample(s). Users are however not allowed to put cassettes back into the auto stocker system and thus users must always contact the Nanolab E-beam loading team prior to exposure to have their cassette loaded into the auto loading system. The E-beam loading team can be contacted at [email]. Upon loading a cassette Nanolab staff will visually verify the sample has been inserted and secured correctly. Incorrect sample mounting can lead to severe damage to the internal parts of the JEOL 9500 exposure system. | |||
'''Any user found to violate this rule will be permanently excluded from using the JEOL 9500 system.''' | |||
=Cassette transfer= | =Cassette transfer= | ||