Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 283: | Line 283: | ||
=Cassette transfer= | =Cassette transfer= | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
|- | |||
| [[image:TPE02777|600px]] | |||
|- | |||
| colspan="1" style="text-align:center;| | |||
Only Nanolab staff may load cassettes to the auto stocker. Users must ask the EBL Loading Team for help with this. Photo: Thomas Pedersen. | |||
|} | |||
Prior to exposure the chosen cassette has to be transferred from the auto stocker system and to the main chamber. This is done from the “Loader” module on the control computer | Prior to exposure the chosen cassette has to be transferred from the auto stocker system and to the main chamber. This is done from the “Loader” module on the control computer | ||