Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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***Any user found to violate this rule will be permanently excluded from using the JEOL 9500 system.*** | ***Any user found to violate this rule will be permanently excluded from using the JEOL 9500 system.*** | ||
{| style="color: black;" width="100%" | |||
| colspan="2" | | |||
|- | |||
| style="width: 50%"| | |||
{| style="color: black;" width="100%" | |||
| colspan="2" | | |||
|- | |||
| style="width: 40%"| | |||
[[image:Cleanroom_naming_2017.jpg|500px|thumb|Drawing: DTU CAS Digital]] | |||
|} | |||
| style="width: 50%"| | |||
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!Room number | |||
!Where in the room | |||
!Phone number | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!A-1 | |||
|At III-V RIE | |||
|55 804 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!Ax2 | |||
|At the Lesker | |||
|55 815 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!A-5 | |||
|In the corner near the furnace/plasma asher | |||
|55 803 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!B-1 | |||
|In the corridor | |||
|55 806 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!C-1 | |||
|At the corridor | |||
|55 808 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!D-1 | |||
|The entrance room | |||
|55 703 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!D-3 | |||
|At the KOH | |||
|55 940 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!E-1 | |||
|By the e-beam computers | |||
|55 943 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!E-5/E-4 | |||
|By the MLAs in E-5, by mask aligner in E-4 | |||
|55 946 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!E-6 | |||
|Furnace 6" | |||
|55 948 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!F-1 | |||
|III-V growth | |||
|55 949 | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!F-2 | |||
|To the right of the XRD and Ellipsometer | |||
|55 941 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!F-3 | |||
|DUV Stepper | |||
|55 947 | |||
|- | |||
=Cassette transfer= | =Cassette transfer= | ||