Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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''By Maria Farinha @Nanolab Internal, Jan 2023'' | ''By Maria Farinha @Nanolab Internal, Jan 2023 if nothing more is stated'' | ||
=Al<sub>2</sub>O<sub>3</sub> mask= | =Al<sub>2</sub>O<sub>3</sub> mask= | ||