Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 220: | Line 220: | ||
=Job file compilation= | =Job file compilation= | ||
Once the files are transferred to the EBL control computer | Once the files are transferred to the EBL control computer they can be compiled into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. In a terminal window on desktop two the SDF, JDF and V30 files can be compiled into a MGN file with SCHD command by writing “schd -exptime sdffilename”, where the last part is the name of the actual SDF to compile. | ||
If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a . | If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .MGN file will be generated in the same folder as the SDF file. This file holds all relevant exposure information and it is this file one will load to the Expose module to initiate exposure. | ||
If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. | If compilation does not succeed the terminal will respond with a number of errors indicating which line(s) of the SDF or JDF file is causing the error. The system is extremely sensitive to syntax error and all users will experience compilation errors. The errors can be difficult to decipher, please refer to the '''Compilation Error Guide. UPDATE''' | ||
=Job file verification= | =Job file verification= | ||