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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,186 edits
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=Job file compilation=
=Job file compilation=
At this stage we have a v30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. Magazine files are compiled directly on the control computer and hence the V30, SDF and JDF files have to be transferred to this computer using the FFFTP client available on the support PC. For first time use FFFTP has to be setup on your user account on the support PC. This is done by the following steps:
At this stage we have a V30 file containing the pattern data and an SDF and JDF file describing the exposure parameters. These must be compiled into a magazine file (.mgn) which will completely define the exposure job. Magazine files are compiled directly on the control computer and hence the V30, SDF and JDF files have to be transferred to this computer using the FFFTP client available on the support PC. For first time use FFFTP has to be setup on your user account on the support PC. This is done by the following steps:


*Login to the support PC using your DTU credentials.
*Login to the support PC using your DTU credentials.
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