Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 76: | Line 76: | ||
=== Holes === | === Holes === | ||
Using patterned samples of 1 μm holes with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 28nm of Al<sub>2</sub>O<sub>3</sub> were still intact. When using this recipe, by adjusting the number of cycles, approximately 10 μm was achieved maintaining a straight profile. When going for deeper profiles, 17 μm was also achieved, but the profile started to get positive. Further work may solve the issue. During the recipe, Pegasus 2 conditions were: Outer EM=10A, T=20°C, no clamping, no He BGC and all heaters OFF. | Using patterned samples of 1 μm holes with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 28nm of Al<sub>2</sub>O<sub>3</sub> were still intact. When using this recipe, by adjusting the number of cycles, approximately 10 μm was achieved maintaining a straight profile. When going for deeper profiles, 17 μm was also achieved, but the profile started to get positive. Further work may solve the issue. During the recipe, Pegasus 2 conditions were: Outer EM=10A, T=20°C, no clamping, no He BGC and all heaters OFF. | ||
<br clear="all" /> | |||
<br clear="all" /> | |||
[[File:holes 17 e 10 um.png|400px|left|thumb|'''''Holes profile. #144 cycles for 60 min and #288 cycles for 120 min.<br> | [[File:holes 17 e 10 um.png|400px|left|thumb|'''''Holes profile. #144 cycles for 60 min and #288 cycles for 120 min.<br> | ||
Photo: Maria Farinha @DTU Nanolab, March 2022''''']] | Photo: Maria Farinha @DTU Nanolab, March 2022''''']] | ||