Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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* 0.1s to 2h46min | * 0.1s to 2h46min | ||
|style="background:WhiteSmoke; color:black;" align="left"| | |style="background:WhiteSmoke; color:black;" align="left"| The maximum processing time allowed is '''dependent''' on both '''processing type''' and '''temperature'''. | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan="1"|Heating rate | !style="background:Silver; color:black" align="center" align="center" rowspan="1"|Heating rate | ||