Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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More information and details about each type of processing - achievable using the RTP Annealsys tool - can be found in the following documents. | More information and details about each type of processing - achievable using the RTP Annealsys tool - can be found in the following documents. | ||
*[[ | *[[media:Report_Updated.pdf|Report_Annealsys_Updated_February22 by Inês Diogo@DTU Nanolab]] | ||
*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=5&name=Dissertation_ID_Rapid+Thermal+Processing+and+its+Effects+on+High+Aspect+Ratio+Silicon+Features.pdf| Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features_October22 by Inês Diogo@DTU Nanolab] - requires login | *[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=5&name=Dissertation_ID_Rapid+Thermal+Processing+and+its+Effects+on+High+Aspect+Ratio+Silicon+Features.pdf| Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features_October22 by Inês Diogo@DTU Nanolab] - requires login | ||