Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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The workflow of our example JEOL 9500 job is summarized below and explained in detail in the subsequent sections. In order to optimize usage of the system steps 1 through 3 must all be done ahead of the booked session on the 9500 system. | The workflow of our example JEOL 9500 job is summarized below and explained in detail in the subsequent sections. In order to optimize usage of the system steps 1 through 3 must all be done ahead of the booked session on the 9500 system. | ||
#Substrate preparation | #Substrate preparation - resist coating | ||
#Pattern preparation - export to JEOL52 V3.0 (V30) format | |||
#Pattern preparation | |||
#Job preparation | #Job preparation | ||
##Jobdeck file (JDF) and schedule file (SDF) preparation | ##Jobdeck file (JDF) and schedule file (SDF) preparation | ||