Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 8: | Line 8: | ||
==JEOL 9500 example workflow== | ==JEOL 9500 example workflow== | ||
The workflow of our example JEOL 9500 job is summarized below and explained in detail in the subsequent sections. In order to optimize usage of the system steps 1 | The workflow of our example JEOL 9500 job is summarized below and explained in detail in the subsequent sections. In order to optimize usage of the system steps 1 through 3 must all be done ahead of the booked session on the 9500 system. | ||
#Substrate preparation | #Substrate preparation | ||