Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions
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|}<p class=MsoNormal><span lang=DA> </span></p> | |}<p class=MsoNormal><span lang=DA> </span></p> | ||
=With CF4 and H2 chemistry by ''Peixiong | =With CF4 and H2 chemistry by ''Peixiong Shi, DTU Nanolab''= | ||
==Part 1== | ==Part 1== | ||