Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
Tag: Manual revert |
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|style="background:WhiteSmoke; color:black;" align="center"|<b>Comments</b> | |style="background:WhiteSmoke; color:black;" align="center"|<b>Comments</b> | ||
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!style="background:Silver; color:black" align="center" align="center" rowspan=" | !style="background:Silver; color:black" align="center" align="center" rowspan="2"|Temperature | ||
|style="background:Silver; color:black"| | |style="background:Silver; color:black"|Temperature Control | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* up to 1250 <sup>o</sup>C | * up to 1250 <sup>o</sup>C | ||
|style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | |||
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|style="background:Silver; color:black"|Power Control | |||
|style="background:LightGrey; color:black"| | |||
* 0% - 100% | |||
|style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | |style="background:WhiteSmoke; color:black;" align="left"|The maximum temperature allowed is '''dependent''' on both '''processing type''' and '''time'''. | ||
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