Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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=RTP Annealsys - Rapid Thermal Processor= | =RTP Annealsys - Rapid Thermal Processor= | ||
[[File:LL&station Annealsys.png| | [[File:LL&station Annealsys.png|300px|thumb|right|The RTP Annealsys work station and loadlock are located in the DTU Nanolab cleanroom B-1. Image: Maria Farinha@DTU Nanolab, February 2023]] | ||
''This page is written by Inês Diogo@DTU Nanolab if nothing else is stated.'' | ''This page is written by Inês Diogo@DTU Nanolab if nothing else is stated.'' | ||