Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Lithography TPT lecture slides</big>''' | '''<big>Lithography TPT lecture slides</big>'''<br> | ||
'''Access to slides require login''' | |||
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | *[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]] | ||
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]] | *[[:Media:Litho_Tool_Package_-_Spin_coating.pdf|TPT slides: Spin Coating]] | ||
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'''<big>Manuals</big>''' | '''<big>Manuals</big>'''<br> | ||
'''Access to manuals require login''' | |||
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV] | *Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV] | ||
*Manual Spin Coater: [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Spin Coater: Labspin 02] or [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=387 Spin Coater: Labspin 03] | *Manual Spin Coater: [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=362 Spin Coater: Labspin 02] or [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=387 Spin Coater: Labspin 03] | ||