Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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[[File:BeamScatter2.png|1200px|center|frameless]] | [[File:BeamScatter2.png|1200px|center|frameless]] | ||
Beamer provides three methods of defining a PSF. Either load | |||
[[File:BeamerPEC.png|2500px|center|frameless]] | |||
== Pattern fracturing == | == Pattern fracturing == | ||