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Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions

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[[File:BeamScatter2.png|1200px|center|frameless]]
[[File:BeamScatter2.png|1200px|center|frameless]]
Beamer provides three methods of defining a PSF. Either load
[[File:BeamerPEC.png|2500px|center|frameless]]


== Pattern fracturing ==
== Pattern fracturing ==