Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*100 - 5000 rpm (3000 rpm with edge handling chuck) | *100 - 5000 rpm (3000 rpm with edge handling chuck) | ||
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|- | |- | ||
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*optional (max. speed 3000 rpm) | *optional (max. speed 3000 rpm) | ||
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*no | *no | ||
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*150 mm wafer | *150 mm wafer | ||
*small pieces down to 10x10 mm2 | *small pieces down to 10x10 mm2 | ||
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*Any sample(s) that fit inside machine | *Any sample(s) that fit inside machine | ||
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*1 | *1 | ||
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*1 | *1 | ||
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*III-V materials | *III-V materials | ||
*Glass | *Glass | ||
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*All chemicals to be spray coated must be approved specifically for spray coating | *All chemicals to be spray coated must be approved specifically for spray coating | ||