Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions
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==Al2O3 etching by sanvis@nanolab [[Image:section under construction.jpg|70px]]== | ==Al2O3 etching by sanvis@nanolab [[Image:section under construction.jpg|70px]]== | ||
[[ | [[Media:Alumina etch information.pptx|Persentation made by Sanvis @DTU Nanolab]] | ||
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