Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Coater: Gamma E-beam and UV|Spin Coater: Gamma E-beam and UV]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin Coater: Gamma E-beam and UV|Spin Coater: Gamma E-beam and UV]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters# | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Labspin|Spin Coater: LabSpin 02]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters# | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Labspin|Spin Coater: LabSpin 03]]</b> | ||
|style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spray Coater|Spray Coater]]</b> | |style="background:WhiteSmoke; color:black"|<b>[[Specific_Process_Knowledge/Lithography/Coaters#Spray Coater|Spray Coater]]</b> | ||
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**AZ5214E, AZ4562, AZMiR701, AZnLOF, SU-8 | **AZ5214E, AZ4562, AZMiR701, AZnLOF, SU-8 | ||
*Coating of imprint resists | *Coating of imprint resists | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Spraying imprint resist | *Spraying imprint resist | ||
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* Vacuum chucks for chips, 2", 4", and 6" | * Vacuum chucks for chips, 2", 4", and 6" | ||
* 4" edge handling chuck | * 4" edge handling chuck | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Can handle almost any sample size and shape | * Can handle almost any sample size and shape | ||
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* No permanent media | * No permanent media | ||
|colspan="2" rowspan="2" align="center" style="background:WhiteSmoke; color:black"|Only manual dispense | |colspan="2" rowspan="2" align="center" style="background:WhiteSmoke; color:black"|Only manual dispense | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* No permanent media | * No permanent media | ||