Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 414: | Line 414: | ||
'''The user manual, user APV, and contact information can be found in LabManager:''' | '''The user manual, user APV, and contact information can be found in LabManager:''' | ||
[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=378 Buffered HF-Clean in LabManager] | [https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=378 Buffered HF-Clean in LabManager] - '''requires login''' | ||
===Process information=== | ===Process information=== | ||
More information on BHF: | More information on BHF: | ||
[[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch (BHF)]] | [[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch (BHF)]] | ||