Specific Process Knowledge/Thin film deposition/Deposition of MgO: Difference between revisions
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===Depth-profiles=== | ===Depth-profiles=== | ||
Depth profiles show chemical shifts of O-1s and Mg-1s peaks as a function of etch depth. The shape | Depth profiles show chemical shifts of O-1s and Mg-1s peaks as a function of etch depth. The shape confirms the model presented in the figure of the model image, where the MgO thin film consists of a bottom intermediate layer, a main Layer with a linearly dependent density, and a topmost layer of moisture. This model is also successfully applied to XRR fitting. | ||
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<gallery caption="Figure 4. Depth-profile XPS analysis." widths=" | <gallery caption="Figure 4. Depth-profile XPS analysis." widths="190px" heights="150px" perrow="4"> | ||
image:eves_MgO_XPS_12h_Mg1s_20220105.png|Mg 1s. Surface and first two etch levels only. | image:eves_MgO_XPS_12h_Mg1s_20220105.png|Mg 1s. Surface and the first two etch levels only. | ||
image:eves_MgO_XPS_12h_O11s_20220105.png|O 1s. Surface and first two etch levels only. | image:eves_MgO_XPS_12h_O11s_20220105.png|O 1s. Surface and the first two etch levels only. | ||
image:eves_MgO_XPS_12h_Si2p_20220105.png|Si 2p. Surface and first two etch levels only. | image:eves_MgO_XPS_12h_Si2p_20220105.png|Si 2p. Surface and the first two etch levels only. | ||
image:eves_MgO_XPS_12h_C1s_20220105.png|C 1s. Surface and first two etch levels only. | image:eves_MgO_XPS_12h_C1s_20220105.png|C 1s. Surface and the first two etch levels only. | ||
image:eves_MgO_XPS_12h_Mg1s_2D_20220105.png|Mg 1s. Total depth. | image:eves_MgO_XPS_12h_Mg1s_2D_20220105.png|Mg 1s. Total depth. | ||
image:eves_MgO_XPS_12h_O1s_2D_20220105.png|O 1s. Total depth. | image:eves_MgO_XPS_12h_O1s_2D_20220105.png|O 1s. Total depth. | ||