Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8"): Difference between revisions

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 ''This page is written by DTU Nanolab  internal''
-[[Category: Equipment |Thermal C1]]
+[[index.php?title=Category:Equipment|Thermal C1]]
-[[Category: Thermal process|C1]]
+[[index.php?title=Category:Thermal process|C1]]
-[[Category: Furnaces|C1]]
+[[index.php?title=Category:Furnaces|C1]]
 ==Oxidation (8") furnace (E1)==
-[[Image:E1_furnace.JPG|thumb|300x300px|Oxidation (8") furnace (E1). Positioned in cleanroom E-6/ Photo: DTU Nanolab internal]]
+[[Image:E1_furnace.JPG|thumb|300x300px|Oxidation (8") furnace (E1). Positioned in cleanroom E-6.''Photo: DTU Nanolab internal'']]
-The Oxidation (8") furnace (E1) is a Tempress horizontal furnace for oxidation and annealing of silicon wafers. Both 150 mm and 200 mm wafers can be processed in the furnace.
+The Oxidation (8") furnace (E1) is a Tempress horizontal furnace for oxidation and annealing of silicon wafers.
-The Oxidation (8") furnace is the top furnace tube in the furnace E-stack, which positioned in cleanroom E-6. Most of wafers have to be RCA cleaned, before they enter the furnace. The only exceptions are brand new wafers, wafers from the A-stack furnaces, wafers from C1 furnace, wafers from the LPCVD furnaces (B- and other E-stack furnaces) and wafers from PECVD4 (not III-V materials). Please check the cross contamination information in LabManager, before you use the furnace.
+Both 150 mm and 200 mm wafers can be processed in the furnace. 100 mm wafers can also be processed in the furnace, but they should normally go in one of the other furnaces in the cleanroom instead. To switch between different wafer sizes, the furnace responsible persons will have to switch the quartz boats in the furnace.
-Oxygen is using as oxidant for dry oxidation, and for wet oxidation wafer vapour generated by a steamer is used as oxidant. The oxidation recipes on the furnace are named e.g. "WET1000" and "DRY1000", where "WET" or "DRY" indicates whether it is a wet or dry oxidation process, and the number indicates the oxidation temperature.
+The Oxidation (8") furnace is the top furnace tube in the furnace E-stack, which positioned in cleanroom E-6. New silicon wafers bought from DTU Nanolab can go directly into the furnace. Wafers from the A-stack furnaces, the C1 furnace, the LPCVD furnaces (B- and other E-stack furnaces) and from PECVD4 (not III-V materials) can also go directly into the furnace. All processed wafers have to be RCA cleaned, before they enter the furnace. Please check the cross contamination information in LabManager, before you use the furnace.
+Oxygen is using as oxidant for dry oxidation, and for wet oxidation wafer vapour generated by a Bronkhorst steamer is used as oxidant. The oxidation recipes on the furnace are named e.g. "WET1000" and "DRY1000", where "WET" or "DRY" indicates whether it is a wet or dry oxidation process, and the number indicates the oxidation temperature.
 Annealing can be done for silicon wafers with layers of e.g. silicon oxide, silicon nitride, polysilicon or BPSG glass (deposited in PECVD4). The annealing recipes are named e.g. "ANN1000" (for annealing at 1000 <sup>o</sup>C).