Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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|'''Etch rate in SiO<math>_2</math>''' | |'''Etch rate in SiO<math>_2</math>''' | ||
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*~7nm/min (80 <sup>o</sup>C) | |||
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|'''Etch rate in SiO<math>_2</math>''' | |'''Etch rate in SiO<math>_2</math>''' | ||
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*~7nm/min (80 <sup>o</sup>C) | |||
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