Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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=Bringing samples into the DTU Nanolab cleanroom= | |||
To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the Request to bring samples into cleanroom form and submitting it to | |||