Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*Silicon Nitride | *Silicon Nitride | ||
*Aluminum Oxide | *Aluminum Oxide | ||
|style="background:WhiteSmoke; color:black;" align="left"| Silicon nitride and aluminum oxide are only used as coating/masking materials and have been proven capable of sustaining this type of high temperature processing. | |style="background:WhiteSmoke; color:black;" align="left"| '''Silicon nitride''' and '''aluminum oxide''' are only used as '''coating/masking materials''' and have been proven capable of sustaining this type of high temperature processing. | ||
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