Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
| Line 82: | Line 82: | ||
|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
| | | | ||
| | | | ||
|- | |- | ||
| Line 82: | Line 82: | ||
|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
| | | | ||
| | | | ||
|- | |- | ||