Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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= DREM 2kW micro = | = DREM 2kW micro = | ||
{{Template: | {{Template:Peg1Table9Head | ||
|TableHeader=DREM 2kW micro | |TableHeader=DREM 2kW micro | ||
}} | }} | ||
{{Template: | {{Template:Peg1Table9Row | ||
|RecipeName=DREM 2kW micro | |RecipeName=DREM 2kW micro | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | ||
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|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro | '''8''']] | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/DREM/DREM 2kW micro | '''8''']] | ||
}} | }} | ||
{{Template: | {{Template:Peg1Table9Row | ||
|RecipeName=DREM 2kW micro | |RecipeName=DREM 2kW micro | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | ||