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Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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A Beamer flow can be found here with a default setup.
In this way structures can be defined with best possible edge definition while keeping exposure time down. A Beamer flow with a default bulk and sleeve setup can be found here.




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