Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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The bath is dedicated wafer with electroplated Nickel or otherwise dirty wafers | The bath is dedicated wafer with electroplated Nickel or otherwise dirty wafers | ||
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|style="background:LightGrey; color:black"|Link to safety APV and | |style="background:LightGrey; color:black"|Link to safety APV and SDS | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4964&mach=376 see APV here] | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4964&mach=376 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see | *:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see SDS here] | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4964&mach=376 see APV here] | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4964&mach=376 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see | *:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see SDS here] | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4897&mach=407 see APV here] | *:[http://labmanager.danchip.dtu.dk/d4Show.php?id=4897&mach=407 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see | *:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see SDS here] | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="7"|Performance | ||