Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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The chamber has stainless steel walls (water-cooled) and a top and bottom halogen lamp-configuration (16 infra-red lamps, in total). As such, the samples are rapidly heated from both sides, simultaneously. In addition, the chamber is enclosed by two quartz-windows (immediately below/above the set of top/bottom lamps) and these are air-cooled. It is also connected to two external vacuum pumps, to a gas inlet and the loadlock. | The chamber has stainless steel walls (water-cooled) and a top and bottom halogen lamp-configuration (16 infra-red lamps, in total). As such, the samples are rapidly heated from both sides, simultaneously. In addition, the chamber is enclosed by two quartz-windows (immediately below/above the set of top/bottom lamps) and these are air-cooled. It is also connected to two external vacuum pumps, to a gas inlet and the loadlock. | ||
Similarly, the loadlock is | Similarly, the loadlock is connected to two external pumps. Moreover, the chamber and the loadlock are separated by the gate valve. While processing, the valve remains closed; it is only opened to exchange the substrates when both chamber and loadlock are under turbo vacuum. The substrate transfer is possible due to the mechanical, retractable arm. | ||
==Temperature Measurement and Control== | ==Temperature Measurement and Control== | ||
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==Previous work on RTP Annealsys== | ==Previous work on RTP Annealsys== | ||
More information and details about each type of processing | More information and details about each type of processing - achievable using the RTP Annealsys tool - can be found in the following documents. | ||
'''''Important remark: The RTO sequences developed during the previous experimental work on the RTP Annealsys are not available. More tests and further investigation are required to prevent damaging the tool.''''' | '''''Important remark: The RTO sequences that were developed during the previous experimental work on the RTP Annealsys are not available to users. More tests and further investigation are required to prevent damaging the tool.''''' | ||
[[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | [[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | ||