Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
Tag: Manual revert |
|||
| Line 50: | Line 50: | ||
Do '''NOT''' place any sort of text or other structures inside alignment crosses. If any other feature appear in a beam scan the system will not be able to determine which feature is the actual alignment cross. | Do '''NOT''' place any sort of text or other structures inside alignment crosses. If any other feature appear in a beam scan the system will not be able to determine which feature is the actual alignment cross. | ||
[[File: | [[File:RoughFineScan.png|250px|center|frameless]] | ||
=== Placement of alignment marks === | === Placement of alignment marks === | ||