Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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Photo: Maria Farinha @DTU Nanolab, March 2022''''']] | Photo: Maria Farinha @DTU Nanolab, March 2022''''']] | ||
{| border="1" style="text-align: center; width: 900px; height: 200px" | {| border="1" style="text-align: center; width: 900px; height: 200px" | ||
|+ 1μm holes recipe | |+ '''1μm holes recipe''' | ||
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|-style="background:LightGray; color:Black" | |-style="background:LightGray; color:Black" | ||