Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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The most suitable removal power was 40 W, removing the bottom of the profile correctly without damaging the top part of the profile. | The most suitable removal power was 40 W, removing the bottom of the profile correctly without damaging the top part of the profile. | ||
[[File:nH E-time.png|500px|left|thumb|'''''Nanoholes profile when varying the ramping E-time .''''']] | [[File:nH E-time.png|500px|left|thumb|'''''Nanoholes profile when varying the ramping E-time .<br> | ||
Photo: Maria Farinha @DTU Nanolab, March 2022''''']] | |||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 200nm nanoholes recipe from July 2022 | |+ 200nm nanoholes recipe from July 2022 | ||