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Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon|Silicon (Si)]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon|Silicon (Si)]]
*Iron (Fe)
*Iron (Fe)
*+ many more (ask)


Contcat the pvd-group if you have special needs (pvd@danchip.dtu.dk).
Contact the pvd-group if you have special needs (pvd@danchip.dtu.dk).




==Overview of the performance of Alcatel and some process related parameters==
==Overview of the performance of Sputter-System(Lesker) and some process related parameters==


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