LabAdviser

Photos: DTU Nanolab

This page is writte by nanolab internal
LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, please take a look at our homepage. You can also take a virtual tour of the DTU Nanolab cleanroom facility or explore our YouTube channel with a selection of training videos.

LabAdviser contains information about

• equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.
• fabrication steps in micro and nano fabrication that takes place at the cleanroom fabrication facility and surroundings and
• electron microscopy methods that takes place at building 314/307.

An overview of the equipment in these facilities can be found and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to advise you to the right equipment and to advise you to a good starting point for your micro and nano fabrication steps as for your electron microscopy work. This should not be replacing communication with the staff of the facilities but we recommend it as a good starting point before contacting the staff. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for the staff of the facilities. If you need further information about certain machinery or processes, please contact the relevant staff. Any feedback or input you might have to LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@nanolab.dtu.dk

News in LabAdviser:

• The latest LabAdviser update: LabAdviser update send out 2022-01-19
  
• Slides from the latest Tech Forum from October 25, 2022 are here: https://sites.dtu.dk/ffunanolab

Contents

DTU Nanolab on YouTube [[1]]

Take a virtual tour in the DTU Nanolab cleanroom [[2]]

• Introduction to LabAdviser and Micro/Nano Fabrication
• Introduction to LabManager
• Process flow template & approval (fabrication)

• Characterization in building 314/307
• Micro and Nano Fabrication Overview
• DTU Nanolab Projects - Technology Research
• Courses (Introduction course, Tool Package Training's (TPT))

• Surveys, statistics, monthly LabAdviser updates and other info.
• How to add information to LabAdviser

Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser

All drawings done by Jesper Hanberg @DTU Nanolab

Front Image - - - Clean your sample Dry your sample Create a thin film on your sample Dope your sample Thermal treatment of your sample Make a mask on your sample Transfer pattern to your sample Define your structure directly Bond your samples together Characterize your sample Pack your sample Process flow examples	Photo: DTU Nanolab	Clean your sample Entry page in LabAdviser Techniques Materials Wafer cleaning Soap Sonic Removes dust and particles 7-up & Piranha Removes traces of organics and alkali ions RCA Two step process to remove traces of organics and metals 5% HF Removes native oxide IMEC Removing dust, traces of organics and alkali ions and slightly polish the surface. Make the surface hydrophillic Dry your sample Entry page in LabAdviser Techniques Materials Wafer and sample drying Spin dryers Whole wafers Critial point dryer Sensitive wafers Ethanol fume drying Sensitive wafers N2 blow drying N2 pistols Create a layer/film on your sample Entry page in LabAdviser Techniques Materials Thermal Process/Oxidation Thermal oxidation Thermal SiO2 Thin film deposition Sputter deposition Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru Semiconductors: Si, Ge, ZnO Oxides: SiO2, ITO, TiO2, Al2O3, MgO, Ta2O5 Cr2O3 Transparent Conducting Oxides: ITO, AZO Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ Thermal evaporation Al, Ge, Ag E-beam evaporation Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Nb, Pd, Ag, Cu, W, Ta Semiconductors: Si, Ge Oxides: SiO2, TiO2 Alloys: NiCr, TiAl LPCVD Si3N4, SRN, SiO2, Si (poly and amorph) PECVD Si3N4, SiO2, PBSG MVD FDTS Electroplating Ni Epitaxial growth /MOCVD Al, As, Ga, In, P. doping: Si, Zn Lithography/Coaters Spin coating resists, polymers Spray coating resists, polymers Dope your sample Entry page in LabAdviser Techniques Materials Doping Ion implant e.g. P, B, As PECVD Deposition of SiO2 or Si3N4 doped with P,B and Ge LPCVD Deposition of PolySi doped with B or P Predeposition and drive-in Doping Silicon wafers with boron Predeposition and drive-in Doping Silicon wafers with phosphorus Thermal treatment of your sample Entry page in LabAdviser Techniques Materials Thermal Process Annealing (>350C) Si, PECVD layers, Al, BCB curing, Polymer Oxidation Si wafers Doping with B/P Si wafers Pyrolysis Resists: AZ, SU8, PDMS Rapid Thermal Anneal (RTP) SiO2, Si3N4, Ti, III-V Lithography/Baking Baking (<300dg) baking resist and polymers Make a mask on your sample Entry page in LabAdviser Techniques Materials Lithography Pattern design & Mask fabrication Photolithography UV resists Deep UV lithography DUV resists E-beam lithography E-beam resists Imprinting Polymers Transfer mask pattern to your sample Entry page in LabAdviser Techniques Materials Etch Wet etch Si, Glass, SiO2, Si3N4, Al, Cr, Ti, Au, Pt, InP, InGaAsP, GaAs/AlGaAs Dry etch Any material Lithography/Lift-off Lift-off Most materials Define your structure directly Entry page in LabAdviser Techniques Materials Direct Structure Definition Polymer Injection molding Topas, PP, PE, PS LASER micro machining Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA Dicing saw Silicon, Glass (Pyrex, fused silica) Imprinting TOPAS, PMMA Hot Embosser Topas, PP, PE, PS, PC, PMMA, ... Lithography definition SU8, AZ resists Bond your samples together Entry page in LabAdviser Techniques Bonding Eutectic bonding Fusion bonding Anodic bonding Etch/DryEtchProcessing/Bonding Temporary bonding of wafers or chips for dry etching Characterize your sample Entry page in LabAdviser What do you need to measure? Technique/Method Characterization Sample Imaging, XY dimensions Microscopy: optical, SEM, AFM Sample Topography AFM, Profiling with stylus or optical Film thickness and optical constants Ellipsometry, Reflectometry, Prism Coupling Film Stress Profiling with stylus or optical Wafer thickness Micrometer gauge Element analysis XPS, EDX, SIMS Contact Angle Drop shape analyzing Resistivity Four point probe, Probe station Doping level/Carrier density ECV (Electrochemical Capacitance-Voltage) -profiler Direct Bandgap Photoluminescence Lattice mismatch X-ray diffractometer Defects/contamination Particle/defect counter Pack your sample (back-end) Entry page in LabAdviser Techniques Back-end processing Chip/die mounting Wire bonding Dicing Process flow examples Entry page in LabAdviser Topic Introduction to LabAdviser and Processing Solar cell flow Process flow approval Info on process flow review UV Lithography#Resist Overview UV Lithography flows EBeamLithography#E-beam resists and Process Flows E-beam lithography flows

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Contact Information for the DTU Nanolab fabrication part

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).

Subject	Email	Description
Training and Process Flow	training@nanolab.dtu.dk	All requests regarding equipment training and process flows. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
E-beam training	e-beam@nanolab.dtu.dk	Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading	e-beamload@nanolab.dtu.dk	Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries	nanolabsupport@nanolab.dtu.dk	Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
Metal Wishes	metal@nanolab.dtu.dk	Requests for change of metal in Thin Film Deposition equipment. See current and future materials in statuslog of the respective machines. Lesker - status log E-Beam Evaporator (Temescal) - status log E-Beam Evaporator (10-pockets) - status log Sputter-System Metal-Oxide(PC1) - status log Sputter-System Metal-Nitride(PC3) - logbook For requests regarding Wordentec, please contact the Thin Film group directly.
Gas-related Requests	DCH-Gas@nanolab.dtu.dk	All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox	labadviser@nanolab.dtu.dk	Any questions or feedback to LabAdviser.
Commercial Inquiries	sales@nanolab.dtu.dk	For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc

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DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers

Cleanroom building 346 ground floor

Drawing: DTU CAS Digital

Room number Where in the room Phone number A-1 At III-V RIE 55 804 Ax2 At the Lesker 55 815 A-5 In the corner near the furnace/plasma asher 55 803 B-1 In the corridor 55 806 C-1 At the corridor 55 808 D-1 The entrance room 55 703 D-3 At the KOH 55 940 E-1 By the e-beam computers 55 943 E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946 E-6 Furnace 6" 55 948 F-1 III-V growth 55 949 F-2 To the right of the XRD and Ellipsometer 55 941 F-3 DUV Stepper 55 947 Basement 901 Injection molder room in the basement 55 812 Basement 904 To the right of the AFM 55 813

Basement building 346 phase 1

Drawing: DTU CAS Digital

DTU Nanolab building 314 and Phone Numbers

Drawing: DTU CAS Digital	Room number Description Phone number 314-011 QFEG 200 Cryo ESEM 56 406 314-014 Tecnai T20 56 407 314-032 Prep room 1 No phone 314-034 AFEG 250 ESEM 56 414 314-037 Titan ETEM 56 418 314-040 Prep room 2 (Bio) 56 413 314-042 Titan ATEM 56 409 314-060 Nova NanoSEM 600 56 412 314-061 Helios Nanolab 56 411