Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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Chip marks are only scanned after a global alignment and hence the chip mark positions are usually very well known and the chip marks can be much smaller as indicated above. | Chip marks are only scanned after a global alignment and hence the chip mark positions are usually very well known and the chip marks can be much smaller as indicated above. | ||
Do '''NOT''' place any sort of text or other structures inside alignment crosses. If any other feature appear i a beam scan the system will not be able to determine which feature is the actual alignment cross. | |||
[[File:RoughFineScan.png|250px|center|frameless]] | [[File:RoughFineScan.png|250px|center|frameless]] | ||