Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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More information and details about each type of processing, possible to achieve with the RTP Annealsys tool, can be found in the following documents. | More information and details about each type of processing, possible to achieve with the RTP Annealsys tool, can be found in the following documents. | ||
'''''Important remark: The RTO sequences developed during the previous experimental work on the RTP Annealsys are not available. More tests and further investigation is required to prevent any damage to the tool.''''' | |||
[[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | [[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo@DTU Nanolab]] | ||
[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf|Rapid Thermal Annealing and its Effects on High Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]] | [[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf|Rapid Thermal Annealing and its Effects on High Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo@DTU Nanolab]] | ||
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