Specific Process Knowledge/Lithography/SU-8: Difference between revisions
Appearance
| Line 61: | Line 61: | ||
==Exposure== | ==Exposure== | ||
Exposing Su-8 is done using light sources at 375 nm or lower. SU-8 is not sensitive to | Exposing Su-8 is done using light sources at 375 nm or lower. SU-8 is not sensitive to 405 nm light and above. | ||