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Specific Process Knowledge/Lithography/SU-8: Difference between revisions

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==Exposure==
==Exposure==
Exposing Su-8 is done using light sources at 375 nm or lower. SU-8 is not sensitive to H-line and above.
Exposing Su-8 is done using light sources at 375 nm or lower. SU-8 is not sensitive to 405 nm light and above.