Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation: Difference between revisions
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== Alignment preparation == | == Alignment preparation == | ||
=== Alignment mark dimensions === | === Alignment mark dimensions === | ||
[[File:9500AlignmentMarks.png|1000px | [[File:9500AlignmentMarks.png|1000px|center|frameless]] | ||
=== Detection of alignment mark === | === Detection of alignment mark === | ||