Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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=RTP Annealsys - Rapid Thermal Processor= | =RTP Annealsys - Rapid Thermal Processor= | ||
''This entire page is written by Inês Diogo@DTU Nanolab if nothing else is stated.'' | ''This entire page is written by Inês Diogo@DTU Nanolab if nothing else is stated.'' | ||
''January 2023: The RTP Annealsys is being tested, but it is not released for general use yet. Please contact thinfilm@nanolab.dtu.dk for more information.'' | ''January 2023: The RTP Annealsys is being tested, but it is not released for general use yet. Please contact thinfilm@nanolab.dtu.dk for more information.'' | ||