Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| Line 80: | Line 80: | ||
==Previous work on RTP Annealsys== | ==Previous work on RTP Annealsys== | ||
[[media:Report_Annealsys_2022.pdf|Report_Annealsys_December22 by Inês Diogo @ DTU Nanolab]] | |||
[[media:Dissertation_ID_Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf|Rapid Thermal Annealing and its Effects on Hig Aspect Ratio Silicon Features_MasterThesis_ID by Inês Diogo @ DTU Nanolab]] | |||