Specific Process Knowledge/Lithography/nLOF: Difference between revisions
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'''Typical spin parameters:''' | '''Typical spin parameters:''' | ||
*Spin off: 30-60 s | *Spin off: 30-60 s | ||
*Soft bake: | *Soft bake: 60 s @ 110°C | ||
<br clear="all" /> | <br clear="all" /> | ||