Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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'''Up''' = Facing the chamber; '''Up, covered''' = facing the chamber, covered with an identical (in size) Si chip during the process; '''Flipped''' = Facing the carrier wafer; '''HF dip''' = 30s-HF chemical bath, immediately prior to processing. | '''Up''' = Facing the chamber; '''Up, covered''' = facing the chamber, covered with an identical (in size) Si chip during the process; '''Flipped''' = Facing the carrier wafer; '''HF dip''' = 30s-HF chemical bath, immediately prior to processing. | ||
==== RTH ==== | ==== RTH ==== | ||
{| border="1" style="text-align: center" cellspacing="3" cellpadding="5" align="left" | |||
|- | |||
!style="background:LightGray" | Sample ID | |||
!style="background:LightGray" |Gas | |||
!style="background:LightGray" |Flow (SCCM) | |||
!style="background:LightGray" |Temperature (<sup>o</sup>C) | |||
!style="background:LightGray" |Power (%) | |||
!style="background:LightGray" |Pressure (mbar) | |||
!style="background:LightGray" |Time (s) | |||
!style="background:LightGray" |HF dip | |||
!style="background:LightGray" |Position | |||
|- | |||
!style="background:LightGray" | RTA 1 | |||
|Ar||40||1328||80||12||180||No||Up | |||
|- | |||
!style="background:LightGray" | RTA 2 | |||
|Ar | |||
|40 | |||
|1305 | |||
|80 | |||
|0.18 | |||
|180 | |||
|No | |||
|Up, covered | |||
|- | |||
!style="background:LightGray" |RTA 3 | |||
|Ar | |||
|40 | |||
|1244 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |||
|Up, covered | |||
|- | |||
!style="background:LightGray" |RTA 4 | |||
|Ar | |||
|40 | |||
|1307 | |||
|80 | |||
|0.18 | |||
|8 | |||
|No | |||
|Up | |||
|- | |||
!style="background:LightGray" |RTA 5 | |||
|Ar | |||
|40 | |||
|1308 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |||
|Up | |||
|- | |||
!style="background:LightGray" |RTA 6 | |||
|Ar | |||
|40 | |||
|1309 | |||
|80 | |||
|0.18 | |||
|180 | |||
|No | |||
|Up | |||
|- | |||
!style="background:LightGray" |RTA 7 | |||
|Ar | |||
|40 | |||
|1246 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |||
|Flipped | |||
|- | |||
!style="background:LightGray" |RTA 8 | |||
|Ar | |||
|40 | |||
|1248 | |||
|80 | |||
|0.18 | |||
|60 | |||
|Yes | |||
|Flipped | |||
|- | |||
!style="background:LightGray" |RTA 9 | |||
|Ar | |||
|40 | |||
|1244 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |||
|Up | |||
|- | |||
|} | |||
==== Hydrogen/Argon RTA ==== | ==== Hydrogen/Argon RTA ==== | ||
==== Clean BSi ==== | ==== Clean BSi ==== | ||