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__TOC__


AZ 5214E is a positive UV photoresist with image reversal capability.
==Resist description==
AZ 5214E is a positive UV photoresist with image reversal capability. It is considered to have good adhesion when wet etching.


==Spin coating==
==Spin coating==
[[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E using a 30s spin-off, and a 60s@90°C softbake]]
[[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E using a 30 s spin-off, and a 60s @ 90°C softbake]]


'''Typical spin parameters:'''
'''Typical spin parameters:'''
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