Specific Process Knowledge/Lithography/5214E: Difference between revisions
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==Spin coating== | ==Spin coating== | ||
[[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E using a 30s spin-off, and a 60s@90°C softbake]] | [[Image:5214Espincurves.JPG|500x500px|thumb|Spin curves for AZ 5214E using a 30s spin-off, and a 60s@90°C softbake]] | ||
Spin off: 30- | '''Typical spin parameers:''' | ||
*Spin off: 30-60 s | |||
Soft bake: 60s @ 90°C | *Soft bake: 60s @ 90°C | ||
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