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Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions

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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Indiogo (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers
462 edits
Line 101: Line 101:
{| border="1" style="text-align: center" cellspacing="3" cellpadding="10"  align="center"
{| border="1" style="text-align: center" cellspacing="3" cellpadding="10"  align="center"
|-
|-
!Sample ID
!style="background:LightGray" | Sample ID
!Gas
!style="background:LightGray" |Gas
!Flow (SCCM)
!style="background:LightGray" |Flow (SCCM)
!Temperature (<sup>o</sup>C)
!style="background:LightGray" |Temperature (<sup>o</sup>C)
!Power (%)
!style="background:LightGray" |Power (%)
!Pressure (mbar)
!style="background:LightGray" |Pressure (mbar)
!Time (s)
!style="background:LightGray" |Time (s)
!HF dip
!style="background:LightGray" |HF dip
!Position
!style="background:LightGray" |Position
|-
|-
!RTA 1
!style="background:LightGray" | RTA 1
|Ar||40||1328||80||12||180||No||Up
|Ar||40||1328||80||12||180||No||Up
|-
|-
!RTA 2
!style="background:LightGray" | RTA 2
|Ar
|Ar
|40
|40
Line 124: Line 124:
|Up, covered
|Up, covered
|-
|-
!RTA 3
!style="background:LightGray" |RTA 3
|Ar
|Ar
|40
|40
Line 134: Line 134:
|Up, covered
|Up, covered
|-
|-
!RTA 4
!style="background:LightGray" |RTA 4
|Ar
|Ar
|40
|40
Line 144: Line 144:
|Up
|Up
|-
|-
!RTA 5
!style="background:LightGray" |RTA 5
|Ar
|Ar
|40
|40
Line 154: Line 154:
|Up
|Up
|-
|-
!RTA 6
!style="background:LightGray" |RTA 6
|Ar
|Ar
|40
|40
Line 164: Line 164:
|Up
|Up
|-
|-
!RTA 7
!style="background:LightGray" |RTA 7
|Ar
|Ar
|40
|40
Line 174: Line 174:
|Flipped
|Flipped
|-
|-
!RTA 8
!style="background:LightGray" |RTA 8
|Ar
|Ar
|40
|40
Line 184: Line 184:
|Flipped
|Flipped
|-
|-
!RTA 9
!style="background:LightGray" |RTA 9
|Ar
|Ar
|40
|40
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