Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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{| border="1" style="text-align: center; width: 550px; height: 100px;" | {| border="1" style="text-align: center; width: 550px; height: 100px;" | ||
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!width=" | !width="15%" |Sample ID | ||
!width="25%" |Gas | !width="25%" |Gas | ||
!width="25%" |Flow (SCCM) | !width="25%" |Flow (SCCM) | ||
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!width="25%" |Pressure (mbar) | !width="25%" |Pressure (mbar) | ||
!width="25%" |Time (s) | !width="25%" |Time (s) | ||
!width=" | !width="25%" |HF dip | ||
!width="25%" |Position | !width="25%" |Position | ||
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